申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20190250508A1
公开(公告)日:2019-08-15
The present invention can provide a salt capable of producing a resist pattern with satisfactory CD uniformity (CDU), and a resist composition.
A resist composition comprising a resin including a structural unit having an acid-labile group, an acid generator and a compound represented by formula (I):
wherein, in formula (I),
R
1
represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent,
X
1
represents *—CO—O—, *—O—CO—, *—O—CO—O— or *—O—, and * represents a bonding site to R
1
,
L
1
represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH
2
— included in the hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO
2
—,
R
2
represents a saturated hydrocarbon group having 1 to 12 carbon atoms,
u1 represents an integer of 0 to 2,
s1 represents 1 or 2,
t1 represents 0 or 1, in which s1+t1 is 1 or 2,
n represents an integer of 2 or more, and
a plurality of X
1
, L
1
, s1, t1, R
2
and u1 each may be the same or different from each other.