[EN] CHEMICALLY AMPLIFIED POLYMER HAVING PENDANT GROUP WITH CYCLODODECYL AND RESIST COMPOSITION COMPRISING THE SAME [FR] POLYMERE A AMPLIFICATION CHIMIQUE COMPRENANT UN GROUPE PENDANT AVEC CYCLODODECYLE ET COMPOSITION DE RESINE LE RENFERMANT
[EN] CHEMICALLY AMPLIFIED POLYMER HAVING PENDANT GROUP WITH CYCLODODECYL AND RESIST COMPOSITION COMPRISING THE SAME<br/>[FR] POLYMERE A AMPLIFICATION CHIMIQUE COMPRENANT UN GROUPE PENDANT AVEC CYCLODODECYLE ET COMPOSITION DE RESINE LE RENFERMANT
申请人:DONGJIN SEMICHEM CO LTD
公开号:WO2004041770A1
公开(公告)日:2004-05-21
The present invention relates to a chemically amplified polymer having a pendent group with cyclododecyl bonded thereto, a process for the preparation thereof, and a resist composition comprising it, and more particularly, to a novel (meth)acrylic or norbornene carboxylate compound with cyclododecyl bonded thereto, a process for the preparation thereof, a chemically amplified polymer synthesized therewith, and a positive photoresist composition for ArF comprising said polymer, with high resolution and excellent etching resistance.