Film-Forming Composition, Film Formed Thereby, and Method for Manufacturing Organic Semiconductor Element Using Same
申请人:CENTRAL GLASS COMPANY, LIMITED
公开号:US20160181531A1
公开(公告)日:2016-06-23
A film-forming composition according to the present invention includes: a fluororesin having a repeating unit of the general formula (1); and a fluorine-containing solvent.
In the general formula (1), R
1
each independently represents a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group; and R
2
each independently represents a C
1
-C
15
straight, C
3
-C
15
branched or C
3
-C
15
cyclic fluorine-containing hydrocarbon group in which any hydrogen atom may be replaced by a fluorine atom with the proviso that the repeating unit contains at least one fluorine atom; and
This film-forming composition is suitably usable for the manufacturing of an organic semiconductor element because the composition can form a film on an organic semiconductor film; and the formed film has resistance to an etching solvent during the fine pattern processing of the organic semiconductor film by photolithography etc.