Acrylic acid ester derivative and method for producing same, intermediate and method for producing same, high-molecular-weight compound, and photoresist composition
申请人:KURARAY CO., LTD.
公开号:US09395625B2
公开(公告)日:2016-07-19
Provided is an acrylic acid ester derivative which, when used as a constituent unit of a polymer which is included in a photoresist composition for a semiconductor, exhibits excellent lithography characteristics such as LWR and the like. Specifically, provided is an acrylic acid ester derivative represented by the following general formula (1). Furthermore, provided are an intermediate of the acrylic acid ester derivative and a process for producing the same; a polymer containing the acrylic acid ester derivative as a constituent unit; and a photoresist composition for a semiconductor containing the polymer.
wherein, R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12, R13, m, x, and y are as defined in the text of Description.
提供的是一种丙烯酸酯衍生物,当用作聚合物的组成单元时,该聚合物包含在半导体光刻胶组合物中,表现出优异的光刻特性,如LWR等。具体而言,提供的是由下列通式(1)表示的丙烯酸酯衍生物。此外,还提供了丙烯酸酯衍生物的中间体及其制备方法;含有丙烯酸酯衍生物作为组成单元的聚合物;以及用于半导体的光刻胶组合物,其中,R1、R2、R3、R4、R5、R6、R7、R8、R9、R10、R11、R12、R13、m、x和y在说明文中有定义。