Provided is an acrylic acid ester derivative which, when used as a constituent unit of a polymer which is included in a photoresist composition for a semiconductor, exhibits excellent lithography characteristics such as LWR and the like. Specifically, provided is an acrylic acid ester derivative represented by the following general formula (1). Furthermore, provided are an intermediate of the acrylic acid ester derivative and a process for producing the same; a polymer containing the acrylic acid ester derivative as a constituent unit; and a photoresist composition for a semiconductor containing the polymer.
wherein, R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12, R13, m, x, and y are as defined in the text of Description.
提供的是一种
丙烯酸酯衍
生物,当用作聚合物的组成单元时,该聚合物包含在半导体光刻胶组合物中,表现出优异的光刻特性,如LWR等。具体而言,提供的是由下列通式(1)表示的
丙烯酸酯衍
生物。此外,还提供了
丙烯酸酯衍
生物的中间体及其制备方法;含有
丙烯酸酯衍
生物作为组成单元的聚合物;以及用于半导体的光刻胶组合物,其中,R1、R2、R3、R4、R5、R6、R7、R8、R9、R10、R11、R12、R13、m、x和y在说明文中有定义。