Photosensitive composition, compound for use in the photosensitive composition, and pattern forming method using the photosensitive composition
申请人:Wada Kenji
公开号:US20050123859A1
公开(公告)日:2005-06-09
A photosensitive composition comprising a compound capable of generating a specific sulfonic acid upon irradiation with actinic rays or a radiation; a compound capable of generating a specific sulfonic acid upon irradiation with an actinic ray or a radiation; and a pattern forming method using a photosensitive composition comprising a compound capable of generating a specific sulfonic acid upon irradiation with an actinic ray or a radiation.
ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, MASK BLANK PROVIDED WITH ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, PHOTOMASK, PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, ELECTRONIC DEVICE, COMPOUND, AND METHOD FOR PRODUCING COMPOUND
申请人:FUJIFILM Corporation
公开号:US20160280621A1
公开(公告)日:2016-09-29
The composition contains an alkali-soluble resin and a crosslinking agent that is represented by the following General Formula (I). In the formula, each of R
1
and R
6
independently represents a hydrogen atom or a hydrocarbon group having 5 or less carbon atoms; each of R
2
and R
5
independently represents an alkyl group, a cycloalkyl group, an aryl group, or an acyl group; and each of R
3
and R
4
independently represents a hydrogen atom or an organic group having 2 or more carbon atoms, and R
3
and R
4
may be bonded to each other to form a ring.
PHOTOSENSITIVE COMPOSITION, COMPOUND FOR USE IN THE PHOTOSENSITIVE COMPOSITION AND PATTERN FORMING METHOD USING THE PHOTOSENSITIVE COMPOSITION
申请人:KODAMA Kunihiko
公开号:US20080138742A1
公开(公告)日:2008-06-12
The invention is related to an arylsulfonium salt compound having a polycyclic hydrocarbon structure in a cation moiety.
本发明涉及一种在阳离子部分具有多环碳氢结构的芳基磺酸盐化合物。
ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, MASK BLANK PROVIDED WITH ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, ELECTRONIC DEVICE, AND COMPOUND
申请人:FUJIFILM Corporation
公开号:US20160280675A1
公开(公告)日:2016-09-29
The actinic ray-sensitive or radiation-sensitive resin composition includes a crosslinking agent having a polarity converting group and an alkali-soluble resin, in which the polarity converting group is a group capable of decomposing by the action of an alkaline aqueous solution to generate a carboxylic acid or sulfonic acid on the side having a crosslinking group.
RESIST COMPOSITION AND PATTERN-FORMING METHOD USING SAME
申请人:Kamimura Sou
公开号:US20080241737A1
公开(公告)日:2008-10-02
A resist composition comprises (A) at least two kinds of resins each of which decomposes by the action of an acid to undergo an increase in its solubility for an alkali developer, wherein at least one kind of the resins (A) is a resin synthesized by living radical polymerization using a chain transfer agent represented by formula (I):
wherein:
A represents an organic group not containing hetero atoms; and
Y represents an organic group capable of releasing a radical.