A radiation-sensitive resin composition contains: an onium salt compound represented by formula (1); a resin containing a structural unit having an acid-dissociable group; and a solvent. R
1
is a substituted or unsubstituted monovalent organic group having a cyclic structure, or a chain hydrocarbon group having 2 or more carbon atoms. X is an oxygen atom, a sulfur atom, or —NR
α
—. R
α
is a hydrogen atom or a monovalent hydrocarbon group having 1 to 10 carbon atoms. Z
+
is a monovalent onium cation.
一种辐射敏感的
树脂组合物包含:由公式(1)表示的烷基盐化物化合物;含有具有酸解离基团的结构单元的
树脂;以及溶剂。其中,R1是具有环状结构的取代或未取代的一价有机基团,或者是具有2个或更多碳原子的链烃基团。X是氧原子、
硫原子或-NRα-。Rα是氢原子或具有1至10个碳原子的一价碳氢基团。Z+是一价的烷基盐阳离子。