A salt represented by the formula (I0):
wherein Q
1
and Q
2
each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, L
1
represents a divalent C1-C17 hydrocarbon group in which one or more —CH
2
— can be replaced by —O— or —CO—, m represents 1 or 2, and Z
m+
represents m-valent organic or inorganic cation.
SALT, RESIN, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20160052877A1
公开(公告)日:2016-02-25
A salt represented by the formula (I);
wherein Q
1
and Q
2
each independently represent a fluorine atom or a C
1
to C
6
perfluoroalkyl group, L
b1
represents a single bond or a divalent C
1
to C
24
saturated hydrocarbon groupwhere a methylene group may be replaced by an oxygen atom or a carbonyl group and where a hydrogen atom may be replaced by a hydroxyl group or a fluorine atom, and Y represents a hydrogen atom, a fluorine atom, or an optionally substituted C
3
to C
18
alicyclic hydrocarbon groupwhere a methylene group may be replaced by an oxygen atom, a carbonyl group or a sulfonyl group; and Ar represents a divalent C
6
to C
20
aromatic hydrocarbon group, and Z
+
represents an organic sulfonium cation or an organic iodonium cation.
SALT, ACID GENERATOR, RESIN, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20160334702A1
公开(公告)日:2016-11-17
A salt represented by formula (I):
wherein Q
1
and Q
2
independently represent a fluorine atom or a C
1
to C
6
perfluoroalkyl group, R
1
and R
2
in each occurrence independently represent a hydrogen atom, a fluorine atom or a C
1
to C
6
perfluoroalkyl group, z represents an integer of 0 to 6, X
1
represents *—CO—O—, *—O—CO— or —O—, * represents a binding position to C(R
1
)(R
2
) or C(Q
1
)(Q
2
), A
1
represents a C
4
to C
24
hydrocarbon group having a C
4
to C
18
divalent alicyclic hydrocarbon moiety, A
2
represents a C
2
to C
12
divalent hydrocarbon group, R
3
and R
4
independently represent a hydrogen atom or a C
1
to C
6
monovalent saturated hydrocarbon group, R
5
represents a hydrogen atom, a fluorine atom, or a C
1
to C
6
alkyl group where a hydrogen atom may be replaced by a fluorine atom, and Z
+
represents an organic cation.
SALT, ACID GENERATOR, PHOTORESIST COMPOSITION, AND METHOD FOR PRODUCING PHOTORESIST PATTERN
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20160200702A1
公开(公告)日:2016-07-14
A salt represented by the formula (I):
wherein
R
1
represents a C1 to C12 alkyl group in which a methylene group can be replaced by an oxygen atom or a carbonyl group;
Q
1
and Q
2
each independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group;
A
1
represents a lactone ring-containing group which has 4 to 24 carbon atoms;
R
2
represents an acid-labile group; and
“m” represents an integer of 0 to 3.
COMPOUND, RESIN, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20160130210A1
公开(公告)日:2016-05-12
A compound represented by formula (I), a resin including a structural unit derived from the compound and a resist composition including the resin:
wherein R
1
represents a hydrogen atom, a halogen atom or a C
1
to C
6
alkyl group in which a hydrogen atom may be replaced by a halogen atom, R
2
represents a C
1
to C
6
perfluoroalkyl group or *—CHR
f1
R
f2
, * represents a binding site to a carbonyl group, R
f1
and R
f2
each independently represent a C
1
to C
4
perfluoroalkyl group or R
f1
and R
f2
may be bonded together with a carbon atom bonded thereto to form a ring, A
1
represents a single bond, a C
1
to C
6
alkanediyl group or **-A
3
-X
1
-(A
4
-X
2
)
a
-(A
5
)
b
-, ** represents a binding site to an oxygen atom, A
2
, A
3
, A
4
and A
5
each independently represent a C
1
to C
6
alkanediyl group, X
1
and X
2
each independently represent —O—, —CO—O— or —O—CO—, a and b each represent 0 or 1, and W
1
represents a C
5
to C
18
divalent alicyclic hydrocarbon group.