An object of the present invention is to provide a pressure sensitive adhesive sheet that does not adhere to other apparatuses and the like, even when it is applied to a manufacturing including heat treatment or treatment involving heat generation. It is a further object of the present invention to provide a pressure sensitive adhesive sheet for semiconductor wafer processing or the like having unprecedented high-temperature heat resistance, which can be used as a surface protective sheet, a dicing sheet or a pickup sheet, by imparting properties such as protective function of a circuit surface or expanding properties. A pressure sensitive adhesive sheet according to the present invention is characterized by comprising a base material obtained by film-forming and curing a first curable resin, a top coat layer formed on the base material by coating and curing a second curable resin, and a pressure sensitive adhesive layer formed on the opposite side of the base material.
本发明的一个目的是提供一种压敏胶片,即使将其应用于包括热处理或涉及发热的处理在内的制造中,也不会粘附到其他设备等。本发明的另一个目的是提供一种用于半导体晶片加工或类似用途的压敏胶片,它具有前所未有的高温耐热性,通过赋予诸如电路表面保护功能或膨胀性能等特性,可用作表面保护片、切割片或拾取片。根据本发明的压敏胶片,其特征在于包括通过成膜和固化第一固化
树脂获得的基材、通过涂布和固化第二固化
树脂在基材上形成的表层,以及在基材的反面形成的压敏胶层。