PERMANENT RESIST COMPOSITION, CURED PRODUCT THEREOF, AND USE THEREOF
申请人:MicroChem Corp.
公开号:EP1730592A2
公开(公告)日:2006-12-13
EPOXY FORMULATIONS AND PROCESSES FOR FABRICATION OF RELIEF PATTERNS ON LOW SURFACE ENERGY SUBSTRATES
申请人:MicroChem Corp.
公开号:EP2753662B1
公开(公告)日:2020-06-24
[EN] PERMANENT RESIST COMPOSITION, CURED PRODUCT THEREOF, AND USE THEREOF<br/>[FR] COMPOSITION DE RESIST PERMANENTE, PRODUIT DURCI A PARTIR DE CETTE COMPOSITION, ET UTILISATION CORRESPONDANTE
申请人:MICROCHEM CORP
公开号:WO2005079330A2
公开(公告)日:2005-09-01
A permanent photoresist composition comprising: (A) one or more bisphenol A-novolac epoxy resins according to Formula I; wherein each group R in Formula I is individually selected from glycidyl or hydrogen and k in Formula I is a real number ranging from 0 to about 30; (B) one or more epoxy resins selected from the group represented by Formulas BIIa and BIIb; wherein each R1, R2 and R3 in Formula BIIa are independently selected from the group consisting of hydrogen or alkyl groups having 1 to 4 carbon atoms and the value of p in Formula BIIa is a real number ranging from 1 to 30; the values of n and m in Formula BIIb are independently real numbers ranging from 1 to 30 and each R4 and R5 in Formula BIIb are independently selected from hydrogen, alkyl groups having 1 to 4 carbon atoms, or trifluoromethyl; (C) one or more cationic photoinitiators (also known as photoacid generators or PAGs); and (D) one or more solvents.
[EN] EPOXY FORMULATIONS AND PROCESSES FOR FABRICATION OF RELIEF PATTERNS ON LOW SURFACE ENERGY SUBSTRATES<br/>[FR] FORMULATIONS D'ÉPOXYDE ET PROCÉDÉS DE FORMATION DE MOTIFS EN RELIEF SUR DES SUBSTRATS DE FAIBLE ÉNERGIE DE SURFACE
申请人:MICROCHEM CORP
公开号:WO2013036502A1
公开(公告)日:2013-03-14
The present invention is directed to a permanent epoxy photoresist composition useful for making negative-tone, permanent photoresist relief patterns on low surface energy polymer substrates, comprising: (A) one or more epoxy resins according to Formulas I- VI, (B) one or more cationic photoinitiators; (C) one or more film casting solvents; and (D) one or more fluorinated compounds. The present invention is also directed to methods of forming a permanent photoresist relief pattern on a low surface energy polymer substrate using the disclosed composition.