A positive photosensitive resin composition including: a resin comprising a structural unit having an acid dissociative group and a structural unit having a functional group capable of forming a covalent bond by reacting with a carboxyl group or a phenolic hydroxyl group; and an acid generator represented by the following formula (I):
wherein in formula (I), R1 represents a hydrogen atom, an alkyl group, an alkenyl group, a cyano group, an aryl group or the like; R2 represents an alkyl group or an aryl group; each of R3 and R4 independently represents a hydrogen atom, an alkyl group an aryl group or the like; and X represents -O-, -S-, -NH- or the like.
一种正性光敏
树脂组合物,包括:一种
树脂,其结构单元具有酸离解基团,其结构单元具有能与羧基或
酚羟基反应形成共价键的官能团;以及一种由下式(I)代表的酸发生器:
式(I)中,R1 代表氢原子、烷基、烯基、
氰基、芳基或类似基团;R2 代表烷基或芳基;R3 和 R4 各自独立地代表氢原子、烷基、芳基或类似基团;X 代表-O-、-S-、-NH-或类似基团。