A siloxane resin having the formula: (HSiO
3/2
)
a
(RSiO
3/2
)
b
(SiO
4/2
)
c
where R is Z, Z(CH
2
)
n
or ZO(CH
2
)
n
where Z is a phenyl or substituted phenyl group; n has a value of 1 to 6, a has value of 0.01 to 0.7, b has a value of 0.05 to 0.7, c has a value of 0.1 to 0.9 and a+b+c≈1. The siloxane resins are useful in anti-reflective coating compositions.