In the step of manufacturing a photomask, an opaque pattern is formed by using a photosensitive resin composition containing a specified light absorbent, which then used to manufacture a photomask for KrF excimer laser lithography in a short manufacturing time and at a reduced cost. Accordingly, the manufacturing time and the cost for semiconductor integrated circuit devices is reduced.
在制造光掩膜的步骤中,通过使用含有特定光吸收剂的光敏
树脂组合物形成不透明图案,然后用它来制造用于 KrF 准分子激光光刻的光掩膜,制造时间短,成本低。因此,半导体集成电路设备的制造时间和成本都得以降低。