PARRY, RONALD J.;TURAKHIA, RAJESH;BUU, HANH PHUOC, J. AMER. CHEM. SOC., 110,(1988) N 12, 4035-4036
作者:PARRY, RONALD J.、TURAKHIA, RAJESH、BUU, HANH PHUOC
DOI:——
日期:——
CLEANING COMPOSITIONS AND METHODS OF USE THEREOF
申请人:Fujifilm Electronic Materials U.S.A., Inc.
公开号:US20210292685A1
公开(公告)日:2021-09-23
The present disclosure relates to cleaning compositions that can be used to clean semiconductor substrates. These cleaning compositions can be used to remove defects arising from previous processing steps on these semiconductor substrates. These cleaning compositions can remove the defects/contaminants from the semiconductor substrates and thereby make the substrates appropriate for further processing. The cleaning compositions described herein primarily contain at least one organic acid and at least one anionic polymer.
[EN] CLEANING COMPOSITIONS AND METHODS OF USE THEREOF<br/>[FR] COMPOSITIONS DE NETTOYAGE ET LEURS PROCÉDÉS D'UTILISATION
申请人:FUJIFILM ELECTRONIC MAT USA INC
公开号:WO2021188766A1
公开(公告)日:2021-09-23
The present disclosure relates to cleaning compositions that can be used to clean semiconductor substrates. These cleaning compositions can be used to remove defects arising from previous processing steps on these semiconductor substrates. These cleaning compositions can remove the defects/contaminants from the semiconductor substrates and thereby make the substrates appropriate for further processing. The cleaning compositions described herein primarily contain at least one organic acid and at least one anionic polymer.