A polishing solution for metal comprises a specific compound represented and an oxidizing agent. A chemical mechanical polishing method for a semiconductor substrate, comprises: supplying a polishing solution for metal comprising a specific compound; and an oxidizing agent; allowing a polishing face and a face to be polished to be moved relatively to each other while the polishing face and the face to be polished are in contact with each other via the polishing solution for metal; and performing polishing with a contact pressure between the polishing face and the face to be polished in the range of from 1000 to 25000 Pa.
一种
金属抛光液包括一种特定化合物和一种氧化剂。一种用于半导体基板的
化学机械抛光方法,包括:提供由特定化合物和氧化剂组成的
金属用抛光液;在抛光面和被抛光面通过
金属用抛光液相互接触时,允许抛光面和被抛光面相对移动;以及在抛光面和被抛光面之间的接触压力为 1000 至 25000 Pa 的范围内进行抛光。