Quinonediazine sulfonic acid esters and positive photoresist compositions comprising the same
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:EP0695740A1
公开(公告)日:1996-02-07
A compound represented by the general formula (I):
wherein one of R¹ and R² represents -OQ⁴ and the other represents hydrogen, alkyl, cycloalkyl, alkenyl, alkoxy or halogen; R³, R⁴ and R⁵ each independently represent hydrogen, alkyl, cycloalkyl, alkenyl, alkoxy or halogen; provided that when R² is -OQ⁴, both of R³ and R⁴ are hydrogen or at least one of R¹ and R⁵ is alkyl, cycloalkyl, alkenyl, alkoxy;
R⁶ and R⁷ each independently represent hydrogen, alkyl or alkenyl, or R⁶ and R⁷ form a cycloalkane ring; and
Q¹, Q², Q³ and Q⁴ each independently represent hydrogen or an o-quinonediazide sulfonyl group, provided that at least one of Q¹, Q², Q³ and Q⁴ is an o-quinonediazide sulfonyl group;
a process for producing the same; a photosensitizer comprising the same; and a positive resist composition comprising the same; and
1,2,3-Trihydroxy-4-(4-hydroxy-2,5-dimethylbenzyl) benzene and a positive resist composition comprising the same.
通式 (I) 所代表的化合物:
其中 R¹ 和 R² 中的一个代表 -OQ⁴,另一个代表氢、烷基、环烷基、烯基、烷氧基或卤素;R³、R⁴ 和 R⁵ 各自独立地代表氢、烷基、环烷基、烯基、烷氧基或卤素;条件是当 R² 为 -OQ⁴ 时,R³ 和 R⁴ 均为氢或 R¹ 和 R⁵ 中至少有一个为烷基、环烷基、烯基、烷氧基;
R⁶ 和 R⁷ 各自独立地代表氢、烷基或烯基,或 R⁶ 和 R⁷ 构成环烷环;以及
Q¹、Q²、Q³ 和 Q⁴ 各自独立地代表氢或邻喹酮
噻嗪磺酰基,条件是 Q¹、Q²、Q³ 和 Q⁴ 中至少有一个是邻喹酮
噻嗪磺酰基;
生产上述物质的工艺;包含上述物质的光敏剂;以及包含上述物质的正抗蚀剂组合物;以及
1,2,3-三羟基-4-(
4-羟基-2,5-二甲基苄基)苯和由其组成的正抗蚀剂组合物。