According to the present invention, there are provided a fluorine-containing sulfonate salt resin or fluorine-containing sulfonate ester resin having a structure of the following general formula (A) and a fluorine-containing N-sulfonyloxyimide resin having a repeating unit of the general formula (17).
It is possible obtain a resist composition using the above resin such that the resist composition can attain high resolution, wide DOF, small LER and high sensitivity and form a good pattern shape.
根据本发明,提供了具有以下通用式(A)结构的含
氟磺酸盐
树脂或含
氟磺酸酯
树脂以及具有通用式(17)重复单元的含
氟N-磺酰氧
亚胺树脂。可以使用上述
树脂制备抗蚀剂组合物,使抗蚀剂组合物能够达到高分辨率、宽DOF、小LER和高灵敏度,并形成良好的图案形状。