The first one-pot amidation of alkanes and cycloalkanes
作者:Irena S. Akhrem、Dzul’etta V. Avetisyan、Lyudmila Afanas’eva、Sergei V. Vitt、Pavel V. Petrovskii、Alexander Orlinkov
DOI:10.1016/j.tetlet.2007.12.070
日期:2008.2
Alkanes (or cycloalkanes) and CO in the presence of superelectrophilic systems CX4·2AlBr3 (X = Cl, Br) have been applied for the first time as equivalents of acylium salts in one-pot selective syntheses of amides from amines.
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN AND POLYMERIC COMPOUND
申请人:Tokyo Ohka Kogyo Co., Ltd.
公开号:US20140221673A1
公开(公告)日:2014-08-07
A resist composition including a base component (A) which exhibits changed solubility in a developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the base component (A) containing a polymeric compound (A1) having a structural unit (a5) represented by general formula (a5-0) shown below (R
1
represents a sulfur atom or an oxygen atom; R
2
represents a single bond or a divalent linking group; and Y represents an aromatic hydrocarbon group or an aliphatic hydrocarbon group having a polycyclic group, provided that the aromatic hydrocarbon group or the aliphatic hydrocarbon may have a carbon atom or a hydrogen atom thereof substituted with a substituent.
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, AND POLYMERIC COMPOUND
申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20130260312A1
公开(公告)日:2013-10-03
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under the action of acid, the resist composition including a base component that exhibits changed solubility in a developing solution under the action of acid, the base component containing a resin component having a structural unit represented by general formula (a0-1) shown below:
in which R
1
represents a hydrogen atom or an alkyl group of 1 to 5 carbon atoms, R
2
represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, and X represents an oxygen atom, a sulfur atom, or an alkylene group of 1 to 5 carbon atoms which may contain an oxygen atom or a sulfur atom.
PATTERN FORMING METHOD, COMPOSITION KIT AND RESIST FILM, AND METHOD FOR PRODUCING ELECTRONIC DEVICE USING THEM, AND ELECTRONIC DEVICE
申请人:FUJIFILM CORPORATION
公开号:US20160018734A1
公开(公告)日:2016-01-21
There is provided a pattern forming method comprising (a) a step of forming a film on a substrate using an electron beam-sensitive or extreme ultraviolet radiation-sensitive resin composition, (b) a step of forming a top coat layer on the film using a top coat composition containing a resin (T) containing at least any one of repeating units represented by formulae (I-1) to (I-5) shown below, (c) a step of exposing the film having the top coat layer using an electron beam or an extreme ultraviolet radiation, and (d) a step of developing the film having the top coat layer after the exposure to form a pattern.
Pattern forming method, composition kit and resist film, manufacturing method of electronic device using these, and electronic device
申请人:FUJIFILM Corporation
公开号:US10031419B2
公开(公告)日:2018-07-24
There is provided a pattern forming method comprising (i) forming a film on a substrate using an actinic ray-sensitive or radiation-sensitive resin composition which contains (A) a resin which decomposes due to an action of an acid to change its solubility with respect to a developer and (C) a specific resin, (ii) forming a top coat layer using a top coat composition which contains a resin (T) on the film, (iii) exposing the film which has the top coat layer to actinic rays or radiation, and (iv) forming a pattern by developing the film which has the top coat layer after the exposing.