POLYMER THIN FILM, PATTERNED MEDIA, PRODUCTION METHODS THEREOF, AND SURFACE MODIFYING AGENTS
申请人:TADA Yasuhiko
公开号:US20110281085A1
公开(公告)日:2011-11-17
The objects of the present invention are to provide a polymer thin film having finer structure than the conventional product, excellent regularity over a wide range and only limited defects, patterned media, methods for producing the thin film and patterned media, and surface modifying agent used in these production methods.
The method of the present invention is for producing a polymer thin film with a plurality of microdomains regularly arranged in a continuous phase by microphase separation on a substrate, comprising steps for forming a grafted silsesquioxane film on the substrate, and for forming a pattern different in chemical properties from the grafted silsesquioxane film in such a way that the pattern corresponds to the microdomain arrangement.