A composition for film formation capable of forming a coating film excellent in low dielectric constant characteristics, cracking resistance, modulus of elasticity, and adhesion to substrates and useful as an interlayer insulating film material in semiconductor devices, etc. The composition for film formation contains (A) at least one member selected from an aromatic polyarylene and an aromatic poly (arylene ether), (B) a polyvinylsiloxane, and (C) an organic solvent.
一种用于制备薄膜的组合物,能够形成具有低介电常数特性、抗开裂性、弹性模量和对基底的附着力优异的涂层膜,并可用作半导体器件中的层间绝缘膜材料等。该制膜组合物包含(A)至少一种选自芳香族聚
芳烃和芳香族聚(
芳烃醚)的成员,(B)聚
乙烯基硅氧烷和(C)有机溶剂。