申请人:ROHM AND HAAS ELECTRONIC MATERIALS LLC
公开号:US20200377713A1
公开(公告)日:2020-12-03
Disclosed herein is a polymer comprising a first repeat unit and a second repeat unit, where the first repeat unit contains an acid labile group and where the second repeat unit has the structure of formula (1):
wherein R
1
, R
2
and R
3
are each independently hydrogen, a halogen, a substituted or unsubstituted C
1
to C
12
alkyl group or C
3
to C
12
cycloalkyl group optionally containing an ether group, a carbonyl group, an ester group, a carbonate group, an amine group, an amide group, a urea group, a sulfate group, a sulfone group, a sulfoxide group, an N-oxide group, a sulfonate group, a sulfonamide group, or a combination thereof, a substituted or unsubstituted C
6
to C
14
aryl group, or C
3
to C
12
heteroaryl group, wherein the substitution is halogen, hydroxyl, cyano, nitro, C
1
to C
12
alkyl group, C
1
to C
12
haloalkyl group, C
1
to C
12
alkoxy group, C
3
to C
12
cycloalkyl group, amino, C
2
-C
6
alkanoyl, carboxamido, a substituted or unsubstituted C
6
to C
14
aryl group, or C
3
to C
12
heteroaryl group; wherein R
1
and R
2
together optionally form a ring; and wherein n=1-3.