Phase Transfer Catalysis (PTC) Sulfanylation of Some 2-Methylsulfinyl-Cyclanones
摘要:
The sulfanylation reactions of 2-methylsulfinylated cyclopentanone, 1-indanone, and cyclohexanone by a PTC procedure are reported and the yields and diastereoselectivity compared to those obtained by the homogeneousphase method. The stability of the sulfanylated methylsulfinyl derivatives at room temperature versus the instability of the p-tolylsulfinyl derivatives is also reported.
RhH(PPh3)4, 1,2-bis(diphenylphosphino)ethane (dppe), and dimethyl disulfide, ketones without α-activating groups were α-methylthiolated with 1,2-diphenyl-2-methylthio-1-ethanone giving α-methylthio ketones. The reaction of unsymmetrical ketones proceeded at the more substituted carbons. The initial formation of kinetic α-methylthiolated products followed by their rearrangement to thermodynamic products was
Photoacid generator containing two kinds of sulfonium salt compound, chemically amplified resist containing the same and pattern transfer method
申请人:——
公开号:US20020182535A1
公开(公告)日:2002-12-05
A chemically amplified photo-resist contains a photoacid generator for changing the solubility of resin after exposure to 130-220 nanometer wavelength light, and the photoacid generator contains two kinds of sulfonium salt compound expressed by general formulae [1] and [2]
1
so that the chemically amplified photo-resist is improved in resolution, sensitivity and smoothness on side surfaces of a transferred pattern.
Sulfonium salt compound, photoresist composition and method for patterning by employing same
申请人:NEC Corporation
公开号:US06528232B1
公开(公告)日:2003-03-04
A sulfonium salt compound designated by a general formula (I), a photoresist composition containing the sulfonium salt compound and a method for patterning by employing the sulfonium salt compound. In the general formula (I), R1 and R2 are independently selected from the group consisting of a linear alkyl group, a branched alkyl group, a monocyclic alkyl group and a cross-linked cyclic alkyl group, or R1 and R2 having the saturated alkyl group are linked to each other forming a ring or R1 and R2 are linked to each other forming a ring having a substituted oxo group, R3, R4, R5 and R6 are independently selected from the group consisting of a hydrogen atom, a halogen atom, an alkyl group and an alkoxy group having 1 to 4 carbon atoms, X is selected from the group consisting of —CH2—, —C2H4— and —OCH2— (wherein an oxy group is bonded to a benzene ring), and Y− is a counter ion