申请人:International Business Machines
Corporation
公开号:EP0219626A2
公开(公告)日:1987-04-29
This invention relates to a composition of matter useful for applying polyglutarimide-comprised films to a surface, and to a method of determining what the composition of matter should be to obtain a particular applied dry film thickness, wherein the dry film has a uniform thickness profile. In particular, the present invention enables the spin-casting of films comprised of polyglutarimide to film thicknesses greater than 1 micrometer. Films of thicknesses greater than 1 micrometer have particular use in the microelectronics industry, for applications such as planarizing underlayers, metal lift off layers, and as part of multilayer resist structures where it is desired to obtain a high aspect ratio for the resist structure.
本发明涉及一种用于在表面上涂敷由聚戊二酰亚胺组成的薄膜的物质成分,以及一种确定物质成分的方法,以获得特定的涂敷干膜厚度,其中干膜具有均匀的厚度轮廓。特别是,本发明可使聚丁二烯酰胺薄膜的厚度大于 1 微米。厚度大于 1 微米的薄膜在微电子工业中具有特殊用途,如平面化底层、金属掀起层,以及作为多层抗蚀剂结构的一部分,在这些应用中,需要获得抗蚀剂结构的高纵横比。