RESIST UNDERLAYER FILM FORMING COMPOSITION CONTAINING SILICON HAVING NITROGEN-CONTAINING RING
申请人:Nakajima Makoto
公开号:US20120315765A1
公开(公告)日:2012-12-13
There is provided a resist underlayer film forming composition for lithography for forming a resist underlayer film capable of being used as a hardmask. A resist underlayer film forming composition for lithography, includes as a silane compound, a hydrolyzable organosilane, a hydrolysis product thereof, or a hydrolysis-condensation product thereof, wherein the hydrolyzable organosilane is a hydrolyzable organosilane of Formula (1):
R
1
a
R
2
b
Si(R
3
)
4−(a+b)
Formula (1)
wherein R
1
is Formula (2):
in which R
4
is an organic group, and R
5
is a C
1-10
alkylene group, a hydroxyalkylene group, a sulfide bond, an ether bond, an ester bond, or a combination thereof, X
1
is Formula (3), Formula (4), or Formula (5):
R
2
is an organic group, and R
3
is a hydrolysable group.
提供了一种用于制备可用作硬面膜的光刻胶底层膜的抗性底层膜形成组合物。一种用于光刻胶底层膜形成的抗性底层膜形成组合物,包括硅烷化合物作为成分,所述硅烷化合物是可水解的有机硅烷、其水解产物或其水解缩合物,其中所述可水解的有机硅烷是式(1)的可水解的有机硅烷:
R1aR2bSi(R3)4−(a+b)
式(1)
其中R1是式(2):
其中R4是有机基团,R5是C1-10烷基、羟基烷基、硫化键、醚键、酯键或其组合,X1是式(3)、式(4)或式(5):
R2是有机基团,R3是可水解基团。