[EN] FLUOROALKANESULFONIC ACID AMMONIUM SALTS AND METHOD FOR PRODUCING SAME<br/>[FR] SELS AMMONIUM D'ACIDE FLUOROALCANESULFONIQUE ET LEUR PROCÉDÉ DE PRODUCTION
Fluoroalkanesulfonic Acid Ammonium Salts and Method for Producing Same
申请人:Nagamori Masashi
公开号:US20110313190A1
公开(公告)日:2011-12-22
When sulfinating a carboxylic acid bromofluoroalkyl ester by using a sulfinating agent, an organic base is used, thereby obtaining a fluoroalkanesulfinic acid ammonium salt. This is oxidized to obtain a fluoroalkanesulfonic acid ammonium salt. This is used as the raw material and is converted to an onium salt or is converted to an onium salt by going through saponification and esterification, thereby obtaining a fluoroalkanesulfonic acid onium salt. This fluoroalkanesulfonic acid onium salt is useful as a photoacid generator used for chemically amplified resist materials, etc.