申请人:Nagamori Masashi
公开号:US08877960B2
公开(公告)日:2014-11-04
When sulfinating a carboxylic acid bromofluoroalkyl ester by using a sulfinating agent, an organic base is used, thereby obtaining a fluoroalkanesulfinic acid ammonium salt. This is oxidized to obtain a fluoroalkanesulfonic acid ammonium salt. This is used as the raw material and is converted to an onium salt or is converted to an onium salt by going through saponification and esterification, thereby obtaining a fluoroalkanesulfonic acid onium salt. This fluoroalkanesulfonic acid onium salt is useful as a photoacid generator used for chemically amplified resist materials, etc.
当使用亚磺酰化剂对卤代氟烷基酯进行亚磺酰化反应时,需要使用有机碱来制备氟烷磺酸铵盐。将其氧化后,获得氟烷磺酸铵盐,该物质可作为原材料,通过皂化和酯化反应转化为离子盐,从而制备出氟烷磺酸离子盐。该氟烷磺酸离子盐可用作化学增感抗蚀材料中的光酸发生剂等。