NITROGEN-CONTAINING ORGANIC COMPOUND, CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:SAGEHASHI Masayoshi
公开号:US20120052441A1
公开(公告)日:2012-03-01
An aralkylcarbamate of imidazole base is effective as the quencher. In a chemically amplified positive resist composition comprising the carbamate, deprotection reaction of carbamate takes place by reacting with the acid generated upon exposure to high-energy radiation, whereby the composition changes its basicity before and after exposure, resulting in a pattern profile with advantages including high resolution, rectangular shape, and minimized dark-bright difference.
咪唑基团的芳烷基碳酸酯作为猝灭剂是有效的。在包含该碳酸酯的化学放大正性光刻胶组合物中,碳酸酯的去保护反应是通过与在暴露于高能辐射时产生的酸反应来实现的,通过这种方式,组合物在曝光前后改变其碱性,从而得到具有高分辨率、矩形形状和最小化暗亮差异等优点的图案轮廓。