The present invention provides a resin which generates an acid by irradiation and is a salt of an organic cation and an anionic polymer wherein the anionic polymer has no carbon-carbon unsaturated bond. The present invention further provides a chemically amplified resist composition comprising the same.
本发明提供了一种
树脂,该
树脂通过辐射发生酸化作用,是有机阳离子和阴离子聚合物的盐,其中阴离子聚合物没有碳-碳不饱和键。本发明还提供了包含该
树脂的
化学增感光阻组合物。