申请人:CIBA-GEIGY AG
公开号:EP0402315A2
公开(公告)日:1990-12-12
A method of making a metallic pattern on a substrate having a surface comprising bare metal in predetermined areas and metal coated by a resist in remaining areas comprises
(i) protecting the bare metal by electrodepositing thereon a film of an organic resin,
(ii) immersing the substrate bearing the electrodeposited resin film in an aqueous solution or dispersion of a hardening agent for said film, said hardening agent being a material which is curable, either alone or through reaction with functional groups in the electrodeposited resin film, on heating or irradiation, whereby said aqueous solution or dispersion dif fuses into the surface of the electrodeposited resin film,
(iii) subjecting the substrate to curing conditions for the hardening agent, thereby hardening the surface of the electrodeposited film and rendering it resistant to a solvent used to remove the resist and resistant to an etchant used to remove metal from areas exposed by removal of the resist,
(iv) removing the resist from said remaining areas using a solvent which does not remove the electrodeposited resin film, and
(v) etching metal exposed in step (iv) using an etchant which does not remove the electrodeposited resin film.
一种在基底上制作金属图案的方法,该基底的表面包括预定区域的裸金属和剩余区域的抗蚀剂涂层金属,该方法包括
(i) 在裸金属上电沉积一层有机树脂薄膜,以保护裸金属、
(ii) 将承载电沉积树脂薄膜的基底浸入上述薄膜的固化剂水溶液或分散液中,所述固化剂是一种在加热或辐照时可单独固化或通过与电沉积树脂薄膜中的官能团反应固化的材料,从而使上述水溶液或分散液与电沉积树脂薄膜的表面融合、
(iii) 将基底置于固化剂的固化条件下,从而硬化电沉积薄膜的表面,使其能够耐受用于去除抗蚀剂的溶剂,并耐受用于去除抗蚀剂暴露区域金属的蚀刻剂、
(iv) 使用不去除电沉积树脂薄膜的溶剂去除所述剩余区域的抗蚀剂,以及
(v) 使用不去除电沉积树脂薄膜的蚀刻剂蚀刻步骤 (iv) 中暴露的金属。