A positive resist composition comprising the components of: (A) a compound capable of generating an acid upon irradiation with one of an actinic ray and a radiation; (B) a resin that is insoluble or slightly soluble in alkalis, but becomes alkali-soluble under an action of an acid; (C) a basic compound; and (D) a compound comprising at least three hydroxyl groups or at least three substituted hydroxyl groups, and comprising at least one cyclic structure.
一种正抗蚀剂组合物,其成分包括(A) 在光射线和辐射线中的一种照射下能产生酸的化合物;(B) 不溶于或微溶于碱,但在酸的作用下可溶于碱的
树脂;(C) 碱性化合物;以及 (D) 由至少三个羟基或至少三个取代羟基组成,并包含至少一个环状结构的化合物。