Cleaning agent composition, method for cleaning and use thereof
申请人:——
公开号:US20010025017A1
公开(公告)日:2001-09-27
An object of the present invention is to provide a new cleaning agent composition having excellent cleaning power for the surface contamination of a semiconductor wafer or various precisely worked instruments made of glass or ceramic, which is used in the manufacture of wafer; a method for cleaning a wafer; a semiconductor wafer having a surface cleaned by a cleaning method; and a method for manufacturing a semiconductor wafer. A semiconductor wafer is cleaned using a cleaning agent composition including a specific fluorine-containing anionic surfactant, a quaternary ammonium hydroxide and/or an alkanolamine.
CLEANING AGENT COMPOSITION, CLEANING AND PRODUCTION METHODS FOR SEMICONDUCTOR WAFER, AND SEMICONDUCTOR WAFER
申请人:Showa Denko K.K.
公开号:EP1572856A1
公开(公告)日:2005-09-14
CLEANING AGENT COMPOSITION, CLEANING AND PRODUCTION METHODS FOR SEMICONDUCTOR WAFER
申请人:Showa Denko K.K.
公开号:EP1572856B1
公开(公告)日:2008-02-13
Cleaning agent composition, cleaning and production methods for semiconductor wafer, and semiconductor wafer
申请人:Amemiya Masahiro
公开号:US20070010411A1
公开(公告)日:2007-01-11
A cleaning agent composition comprising a nonionic surfactant represented by the following formula (1): R1O(EO)x(PO)yH (I)(wherein R1 represents a linear or branched alkyl group having from 6 to 20 carbon atoms or a linear or branched alkenyl group having from 6 to 20 carbon atoms, EO represents an oxyethylene group, PO represents an oxypropylene group, EO and PO each is bonded by random addition or block addition, x number of EOs and y number of POs are arranged in an arbitrary order, x and y each independently represents an integer of 1 to 20, and x/(x+y) is 0.5 or more) and a quaternary ammonium hydroxide) is provided. Also, cleaning and production methods for semiconductor wafer using the cleaning agent composition and semiconductor wafer produced by the production method are provided.
Ink-jet recording ink set and ink-jet recording method
申请人:Umebayashi Tsutomu
公开号:US20070206045A1
公开(公告)日:2007-09-06
An ink-jet recording ink set, comprising at least one recording liquid containing a colorant and a polymerizable compound and an ink spread suppressing liquid containing at least one surfactant and substantially no colorant, wherein all of the following conditions (A), (B) and (C) are satisfied, and an ink-jet recording method using the same:
(A) the surface tension of the ink spread suppressing liquid is smaller than that of at least one recording liquid contained in the ink-jet recording ink set;
(B) at least one of the surfactants contained in the ink spread suppressing liquid satisfies the following relationship:
γ
s
(0)−γ
s
(saturated)>1 mN/m; and
(C) the surface tension of the ink spread suppressing liquid satisfies the following relationship:
γ
s
<(γ
s
(0)+γ
s
(saturated)
max
)/
2.