申请人:TORAY INDUSTRIES, INC.
公开号:EP1909142A1
公开(公告)日:2008-04-09
The present invention provides a photosensitive resin composition comprising (a) an alkali-soluble resin, (b) a silicon compound having a secondary aromatic amino group and an alkoxy group, and (c) at least one selected from a photopolymerization initiator, a photo acid generator and a photo base generator. According to the present invention, it is possible to obtain a photosensitive resin composition which remarkably enhances the adhesion property with a substrate after curing without deteriorating storage stability of a solution, and does not cause peeling of a fine pattern even upon development.
本发明提供了一种光敏树脂组合物,它包含(a)碱溶性树脂,(b)具有仲芳香族氨基和烷氧基的硅化合物,以及(c)至少一种选自光聚合引发剂、光酸发生剂和光碱发生剂的物质。根据本发明,可以获得一种光敏树脂组合物,它在固化后可显著提高与基底的粘合性,而不会降低溶液的储存稳定性,即使在显影后也不会导致精细图案剥离。