申请人:Rohm and Haas Electronic Materials LLC
公开号:US20130171567A1
公开(公告)日:2013-07-04
A photoacid generator includes those of formula (I):
wherein each R
a
in formula 1 is independently H, F, a C
1-10
nonfluorinated organic group, C
1-10
fluorinated organic group, or a combination comprising at least one of the foregoing, provided at least one R
a
is F or a C
1-10
fluorinated organic group, the C
1-10
fluorinated and nonfluorinated organic groups each optionally comprising O, S, N, or a combination comprising at least one of the foregoing heteroatoms; L
1
is a linking group comprising a heteroatom comprising O, S, N, F, or a combination comprising at least one of the foregoing; G
+
is an onium salt of the formula (II):
wherein in formula (II), X is S or I, each R
0
is independently C
1-30
alkyl group; a polycyclic or monocyclic C
3-30
cycloalkyl group; a polycyclic or monocyclic C
4-30
aryl group; or a combination comprising at least one of the foregoing, provided at least one R
0
is substituted where each R
0
is a C
6
monocyclic aryl group, and wherein when X is I, a is 2, and where X is S, a is 3, p is 0 or 1, and q is an integer of from 1 to 10.
一种光酸发生剂包括以下公式(I)中的化合物:其中,每个公式1中的Rai独立地为H、F、C1-10非氟化有机基团、C1-10氟化有机基团或包含上述至少一种的组合物,至少一个Rai为F或C1-10氟化有机基团,C1-10氟化和非氟化有机基团各自可以包含O、S、N或包含上述至少一种杂原子的组合物;L1是一个连接基团,包括一个包含O、S、N、F或包含上述至少一种的杂原子;G+是公式(II)的阳离子盐:其中,在公式(II)中,X为S或I,每个R0独立地为C1-30烷基、多环或单环C3-30环烷基、多环或单环C4-30芳基或包含上述至少一种的组合物,至少一个R0被取代,每个R0为C6单环芳基,当X为I时,a为2,当X为S时,a为3,p为0或1,q为1到10的整数。