申请人:JSR Corporation
公开号:EP1953593A1
公开(公告)日:2008-08-06
It is intended to provide a radiation-sensitive resin composition, which comprises a radiation-sensitive acid generator excellent in resolution performance, heat stability, and storage stability, suppresses fluctuations in line width and deterioration in pattern profile attributed to standing waves, and produces a resist pattern improved in nano edge roughness and LEF. The radiation-sensitive resin composition is characterized by (A) a radiation-sensitive acid generator comprising: a sulfonium salt compound typified by 2,4,6-trimethylphenyldiphenylsulfonium 2,4-difluorobenzenesulfonate, 2,4,6-trimethylphenyldiphenylsulfonium 4-trifluoromethylbenzenesulfonate, or the like; and a sulfonimide compound. It is preferred that the composition should further comprise (B) a resin typified by a 4-hydroxystyrene/4-t-butoxystyrene copolymer, a 4-hydroxystyrene/t-butyl (meth)acrylate, or the like.
本发明的目的是提供一种辐射敏感树脂组合物,该组合物包含一种在分辨率、热稳定性和储 存稳定性方面都很出色的辐射敏感酸发生器,它能抑制驻波引起的线宽波动和图案轮廓的恶化, 并能产生在纳米边缘粗糙度和 LEF 方面都有所改善的抗蚀图案。辐射敏感树脂组合物的特征在于 (A) 辐射敏感酸发生器,包括:锍盐化合物,如 2,4,6-三甲基二苯基锍 2,4-二氟苯磺酸盐、2,4,6-三甲基二苯基锍 4-三氟甲基苯磺酸盐或类似物;以及磺酰亚胺化合物。组合物最好还包括 (B) 一种树脂,其类型为 4-羟基苯乙烯/4-叔丁氧基苯乙烯共聚物、4-羟基苯乙烯/(甲基)丙烯酸丁酯或类似物。