ALKYL-SUBSTITUTED ALLYL CARBONYL METAL COMPLEXES AND USE THEREOF FOR PREPARING DIELECTRIC THIN FILMS
申请人:Odedra Rajesh
公开号:US20130041170A1
公开(公告)日:2013-02-14
Organometallic complexes and use thereof in thin film deposition, such as CVD and ALD are provided herein. The organometallic complexes are (alkyl-substituted η
3
-allyl)(carbonyl)metal complexes.