Organometallic complexes and use thereof in thin film deposition, such as CVD and ALD are provided herein. The organometallic complexes are (alkyl-substituted η
3
-allyl)(carbonyl)metal complexes.
本文提供了有机
金属配合物及其在薄膜沉积中的应用,如CVD和ALD。这些有机
金属配合物是(烷基取代的η3-烯丙基)(羰基)
金属配合物。