[EN] THERMALLY STABLE VOLATILE FILM PRECURSORS<br/>[FR] PRÉCURSEURS DE FILM MINCE VOLATILS ET THERMIQUEMENT STABLES
申请人:UNIV WAYNE STATE
公开号:WO2010132871A1
公开(公告)日:2010-11-18
A precursor for the deposition of a thin film by atomic layer deposition is provided. The compound has the formula MxLy where M is a metal and L is an amidrazone-derived ligand or an amidate-derived ligand. A process of forming a thin film using the precursors is also provided.
A precursor for the deposition of a thin film by atomic layer deposition is provided. The compound has the formula MxLy where M is a metal and L is an amidrazone-derived ligand or an amidate-derived ligand. A process of forming a thin film using the precursors is also provided.