There are provided a radiation-sensitive resin composition comprising a binder resin (A), radiation-sensitive compound (B), and cross-linking agent (C) represented by the following general formula (1), whereina content of the cross-linking agent (C) is 3 to 25 parts by weight with respect to 100 parts by weight of the binder resin (A):
wherein, in the general formula (1), each of R1 to R3 independently represents a hydrocarbon group having 1 to 10 carbon atoms.
提供了一种辐射敏感
树脂组合物,该组合物由以下通式(1)表示的粘合剂
树脂 (A)、辐射敏感化合物(B)和
交联剂(C)组成,其中
交联剂(C)的含量相对于 100 重量份的粘合剂
树脂(A)为 3 至 25 重量份:
其中,在通式(1)中,R1 至 R3 各自独立地代表具有 1 至 10 个碳原子的烃基。