申请人:DiPietro Richard A.
公开号:US20100062368A1
公开(公告)日:2010-03-11
Polymers for use in photoresist compositions include a repeat unit having a formula of:
wherein Z represents a repeat unit of a polymer backbone; X is a linking group selected from the group consisting of alkylene, arylene, araalkylene, carbonyl, carboxyl, carboxyalkylene, oxy, oxyalkylene, and combinations thereof, and R is selected from the group consisting of hydrogen, alkyl, aryl, and cycloalkyl groups with the proviso that X and R are not part of the same ring system. Also disclosed are processes for patterning a relief image of the photoresist composition, wherein the photoresist composition has an outgassing rate of less than 6.5E+14 molecules/cm
2
/s.
用于光阻组合物的聚合物包括具有以下公式的重复单元:其中Z表示聚合物骨架的重复单元;X是从烷基,芳基,芳基烷基,羰基,羧基,羧基烷基,氧,氧烷基和它们的组合中选择的连接基团,而R是从氢,烷基,芳基和环烷基群中选择的,但X和R不是同一环系统的一部分。还公开了用于形成光阻组合物的浮雕图像的工艺,其中光阻组合物的放气速率小于6.5E + 14分子/厘米2/秒。