申请人:Agency of Industrial Science and Technology
of Ministry of International Trade and Industry
公开号:EP0854024A2
公开(公告)日:1998-07-22
A thin-film fabrication method includes a spray step in which at least one thin-film composition material in liquid form is sprayed into a vacuum vessel via a spray nozzle provided for each thin-film composition material and deposited on a substrate, and a heat treatment step in which the material deposited on the substrate is heat treated. The substrate temperature in the spray step and/or the heat treatment step is controlled within a prescribed temperature range.
一种薄膜制造方法包括喷雾步骤和热处理步骤,在喷雾步骤中,至少一种液态薄膜组合材料通过为每种薄膜组合材料提供的喷嘴喷入真空容器并沉积在基底上,在热处理步骤中,沉积在基底上的材料经过热处理。喷涂步骤和/或热处理步骤中的基底温度控制在规定的温度范围内。