申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20140322650A1
公开(公告)日:2014-10-30
A negative pattern is formed by coating a resist composition comprising a polymer comprising recurring units of formulae (1) and (2) and a photoacid generator of formula (3) onto a substrate, baking, exposure, PEB and developing in an organic solvent. In formulae (1) and (2), R
1
is H, F, CH
3
or CF
3
, Z is a single bond, phenylene, naphthylene, or (backbone)-C(═O)—O—Z′—, Z′ is alkylene, phenylene or naphthylene, XA is an acid labile group, YL is H or a polar group. In formula (3), R
2
and R
3
are a monovalent hydrocarbon group, R
4
is a divalent hydrocarbon group, or R
2
and R
3
, or R
2
and R
4
may form a ring with the sulfur, L is a single bond or a divalent hydrocarbon group, Xa and Xb are H, F or CF
3
, and k is an integer of 1 to 4.
一种负型图案的制备方法,包括将含有公式(1)和(2)重复单元的聚合物和公式(3)的光酸发生剂的抗蚀组合物涂覆到基板上,烘烤、曝光、PEB和在有机溶剂中显影。在公式(1)和(2)中,R1是H,F,
CH3或
CF3,Z是单键,苯基,
萘基或(骨架)-C(═O)-O-Z′-,Z′是烷基,苯基或
萘基,XA是酸敏基团,YL是H或极性基团。在公式(3)中,R2和R3是单价碳氢基团,R4是二价碳氢基团,或R2和R3,或R2和R4可以与
硫形成环,L是单键或二价碳氢基团,Xa和Xb是H,F或 ,k是1到4的整数。