The present invention provides a resin which generates an acid by irradiation and is a salt of an organic cation and an anionic polymer wherein the anionic polymer has no carbon-carbon unsaturated bond. The present invention further provides a chemically amplified resist composition comprising the same.
本发明提供了一种
树脂,通过辐射产生酸,并且是有机阳离子和阴离子聚合物的盐,其中阴离子聚合物没有碳-碳不饱和键。本发明还提供了一种
化学放大抗蚀剂组合物,其中包括上述
树脂。