申请人:Rohm and Haas Electronic Materials LLC
公开号:US20210343522A1
公开(公告)日:2021-11-04
Coating compositions comprise: a B-staged reaction product of one or more compounds comprising: a core chosen from C
6-50
carbocyclic aromatic, C
2-50
heterocyclic aromatic, C
1-20
aliphatic, C
1-20
heteroaliphatic, C
3-20
cycloaliphatic, and C
2-20
heterocycloaliphatic, each of which may be substituted or unsubstituted; and two or more substituents of formula (1) attached to the core:
wherein: Ar
1
is an aromatic group independently chosen from C
6-50
carbocyclic aromatic and C
2-50
heteroaromatic, each of which may be substituted or unsubstituted; Z is a substituent independently chosen from OR
1
, protected hydroxyl, carboxyl, protected carboxyl, SR
1
, protected thiol, —O—C(═O)—C
1-6
alkyl, halogen, and NHR
2
; wherein each R
1
is independently chosen from H, C
1-10
alkyl, C
2-10
unsaturated hydrocarbyl, and C
5-30
aryl; each R
2
is independently chosen from H, C
1-10
alkyl, C
2-10
unsaturated hydrocarbyl, C
5-30
aryl, C(═O)—R
1
, and S(═O)
2
—R
1
; x is an integer from 1 to the total number of available aromatic ring atoms in Ar
1
; and * denotes the point of attachment to the core; provided that when the core comprises an aromatic ring, no substituents of formula (1) are in an ortho position to each other on the same aromatic ring of the core; and one or more solvents, wherein the total solvent content is from 50 to 99 wt % based on the coating composition. Coated substrates formed with the coating compositions and methods of forming electronic devices using the compositions are also provided. The compositions, coated substrates and methods find particular applicability in the manufacture of semiconductor devices.