A chemically amplified resist composition comprising a base polymer, an acid generator, and an amine quencher in the form of a β-alanine, γ-aminobutyric acid or 5-aminovaleric acid derivative having an acid labile group-substituted carboxyl group has a high contrast of alkaline dissolution rate before and after exposure and forms a pattern of good profile at a high resolution, minimal roughness and wide focus margin.
一种
化学增感型光刻胶组合物,包括基础聚合物、酸发生剂和一种
β-丙氨酸、γ-
氨基
丁酸或
5-氨基戊酸衍
生物的胺猝灭剂,其具有酸不稳定基取代的羧基,具有高对比度的碱性溶解速率,在曝光前后形成良好轮廓的图案,具有最小的粗糙度和宽的焦点余量。