metabolic fate of aromaticnitriles, in contrast to their aliphatic counterparts, have been minimal and the subject of controversy. The in vitro metabolic fate of several aromaticnitriles with varying substituents was investigated by using rat liver subcellular fractions, with a particular emphasis on the nitrile moiety. Benzonitriles and 4-cyanophenols underwent oxidative metabolism to produce ring-hydroxylated
COMPOSITION FOR FORMING ANTIREFLECTION FILM FOR LITHOGRAPHY
申请人:Nissan Chemical Industries, Ltd.
公开号:EP1560070A1
公开(公告)日:2005-08-03
There is provided a composition for forming anti-reflective coating for anti-reflective coating that has a good absorption of light at a wavelength utilized for manufacturing a semiconductor device, that exerts a high protection effect against light reflection, that has a high dry etching rate compared with the photoresist layer. Concretely, the composition for forming anti-reflective coating contains a triazine trione compound, oligomer compound or polymer compound having hydroxyalkyl structure as substituent on nitrogen atom.