Towards new precursors for ZnO thin films by single source CVD: the X-ray structures and precursor properties of zinc ketoacidoximates
摘要:
Zinc complexes of pyruvic and glyoxylic acid oximes have been investigated as potential precursors for single source chemical vapour deposition (SSCVD) of ZnO thin films. The X-ray crystal structures of the complexes and of their NOW analogues reveal markedly different coordination and intermolecular bonding patterns. These structural differences, in conjunction with ligand substituent changes impart different responses to thermogravimetric analysis (TGA), and sublimation. The glyoxylic acid methyloxime Zn(O2CCHN(OMe))(2) . 2H(2)O has volatility and thermolysis properties suitable for SSCVD of ZnO. (C) 2004 Elsevier B.V. All rights reserved.
A Photochemically Induced Molecular Pathway to Smooth and Transparent Gallium-Doped Zinc Oxide Ceramic
作者:Rudolf C. Hoffmann、Jörg J. Schneider
DOI:10.1111/j.1551-2916.2010.04310.x
日期:2011.6
The photochemical conversion of the zinc oximato complex of di-aqua-bis[2-(methoxyimino)propanoato]zinc 1 into zinc oxide thin films is introduced as an alternative route compared with the traditional thermal process. Irradiation of 1 by UV light produces smoother films with random orientation of crystalline grains, compared with the thermal route, which results in films with a high degree of (002) orientation (texture) toward the substrate. By addition of Ga(NO3)(3), gallium-doped zinc oxide (GZO) thin films can be obtained after further sintering, e.g., in air. The GZO films exhibit a low surface roughness and a high optical transparency. Electrical resistivities as low as 7.4 x 10-2 center dot cm were observed, making it a candidate for application in the field of transparent conduction oxides.