Photoresist underlayer film-forming composition and pattern forming process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP2813891A2
公开(公告)日:2014-12-17
In lithography, a composition comprising a novolak resin comprising recurring units of hydroxycoumarin is used to form a photoresist underlayer film. The underlayer film is strippable in alkaline water, without causing damage to ion-implanted Si substrates or SiO2 substrates.
Convenient Synthesis of 3-Methylcoumarins and Coumarin-3-carbaldehydes
作者:Temitope O. Olomola、Rosalyn Klein、Perry T. Kaye
DOI:10.1080/00397911.2010.523491
日期:2012.1.15
Rapid, microwave-assisted Baylis-Hillman reactions of substituted salicylaldehydes, followed by one-pot hydrogen iodide-mediated cyclization and reduction of the corresponding adducts, has afforded 3-methylcoumarins in up to 94% yield in the final step. Subsequent microwave-assisted selenium dioxide oxidation of selected 3-methylcoumarins has provided convenient access to the corresponding coumarin-3-carbaldehydes and permitted a significant improvement over the yield obtained using conventional heating.
Neue Sulfonsäureester von Hydroxycumarinen, ihre Herstellung und sie enthaltende Arzneimittel
申请人:BASF Aktiengesellschaft
公开号:EP0111746B1
公开(公告)日:1987-09-16
UNDERLAYER FILM-FORMING COMPOSITION AND PATTERN FORMING PROCESS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20140363956A1
公开(公告)日:2014-12-11
In lithography, a composition comprising a novolak resin comprising recurring units of hydroxycoumarin is used to form a photoresist underlayer film. The underlayer film is strippable in alkaline water, without causing damage to ion-implanted Si substrates or SiO
2
substrates.