Non-subliming Mid-UV dyes and ultra-thin organic arcs having
申请人:Brewer Science, Inc.
公开号:US05688987A1
公开(公告)日:1997-11-18
Mid-UV dyes enabling ultra thin antireflection coatings for multi-layer i-line photoetching are produced from bichalcones; bis-a-cyanoacrylates/bis-cyanoacrylamides; and 1.4 divinylbenzenes. The dyes are nonsubliminal and differentially insoluble in standard photoresist solvents.