申请人:Rohm and Haas Electronic Materials Korea Ltd.
公开号:US20160334703A1
公开(公告)日:2016-11-17
New photobase generators suitable for use in photoresists are provided that correspond to Formula (I):
X
1
—R
1
—O—C(═O)N(R
2
)R
3
(I)
wherein X
1
is an optionally substituted aromatic group; R
1
is a linker; and R
2
and R
3
are the same or different optionally substituted linear, branched or cyclic aliphatic group or an optionally substituted aromatic group, wherein at least one of R
2
and R
3
is an optionally substituted branched alkyl group having 4 or more carbon atoms.
提供了适用于光刻胶的新型光刻底物生成物,对应于式(I):X1—R1—O—C(═O)N(R2)R3(I)其中X1是可选择取代的芳香族基团;R1是连接基团;R2和R3是相同或不同的可选择取代的线性、支链或环烷基基团或可选择取代的芳香族基团,其中R2和R3中至少有一个是具有4个或更多碳原子的可选择取代的支链烷基基团。