The present invention is directed to a thermally curable polymer composition, and a photolithographic substrate coated therewith, the composition comprising a hydroxyl-containing polymer, an amino cross-linking agent and a thermal acid generator. The thermally curable polymer composition may be dissolved in a solvent and used as an undercoat layer in deep UV lithography.
本发明涉及一种热固化聚合物组合物以及涂有该组合物的照相平版印刷基底,该组合物包括一种含羟基聚合物、一种
氨基
交联剂和一种热酸发生剂。热固化聚合物组合物可以溶解在溶剂中,用作深紫外光刻的底层。