Synthesis of Isomeric, Oxathiolone Fused Chalcones, and Comparison of Their Activity toward Various Microorganisms and Human Cancer Cells Line
摘要:
在酸性条件下,通过将适当的乙酰苯并[1,3]氧硫杂环戊-2-酮与苯甲醛缩合,制备了同分异构的氧硫杂环戊酮融合查耳酮。利用 HeLa 细胞对合成的化合物进行了细胞毒性活性筛选,并对黄体微球菌、金黄色葡萄球菌、伤寒沙门氏菌、大肠杆菌、普通变形杆菌进行了抗菌活性筛选,对白色念珠菌进行了抗真菌活性筛选,对结核分枝杆菌 H37Rv 和堪萨斯分枝杆菌菌株进行了抗结核活性筛选。
RESIST COMPOSITION, PATTERNING PROCESS, AND BARIUM, CESIUM AND CERIUM SALTS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20170115566A1
公开(公告)日:2017-04-27
A resist composition comprising a base resin comprising acid labile group-containing recurring units and preferably acid generator-containing recurring units, and a sodium, magnesium, potassium, calcium, rubidium, strontium, yttrium, cesium, barium or cerium salt of α-fluorinated sulfonic acid bonded to an alkyl, alkenyl, alkynyl or aryl group exhibits a high resolution and sensitivity and forms a pattern of satisfactory profile with minimal LWR after exposure and development.
MONOMER, POLYMER, CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Hatakeyama Jun
公开号:US20110294070A1
公开(公告)日:2011-12-01
A polymer is obtained from a hydroxyphenyl methacrylate monomer having an acid labile group substituted thereon. A positive resist composition comprising the polymer as a base resin has a very high contrast of alkaline dissolution rate before and after exposure, a high resolution, a good profile and minimal line edge roughness of a pattern after exposure, a retarded acid diffusion rate, and good etching resistance.
MONOMER, POLYMER, POSITIVE RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20170008982A1
公开(公告)日:2017-01-12
A polymer comprising recurring units derived from a polymerizable monomer having two structures of hydroxyphenyl methacrylate having a hydroxy group substituted with an acid labile group is used as base resin in a positive resist composition, especially chemically amplified positive resist composition. The resist composition forms a resist film which is processed by lithography into a pattern of good profile having a high resolution, minimal edge roughness, and etch resistance.
NITROGEN-CONTAINING MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Sagehashi Masayoshi
公开号:US20120183904A1
公开(公告)日:2012-07-19
A chemically amplified positive resist composition of better performance can be formulated using a polymer having a quencher incorporated therein, specifically a polymer comprising recurring units having a carbamate structure which is decomposed with an acid to generate an amino group and optionally recurring units having an acid labile group capable of generating a carboxyl and/or hydroxyl group under the action of an acid. The polymer is highly effective for suppressing diffusion of acid and diffuses little itself, and the composition forms a pattern of rectangular profile at a high resolution.
POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
申请人:HATAKEYAMA Jun
公开号:US20110171580A1
公开(公告)日:2011-07-14
A positive resist composition comprising a polymer having a tetrahydrobenzocycloheptane-substituted secondary or tertiary carboxyl group ester as an acid labile group exhibits a high contrast of alkaline dissolution rate before and after exposure, a high resolution, a good pattern profile and minimal edge roughness after exposure, a significant effect of suppressing acid diffusion rate, and improved etching resistance.