Sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US07928262B2
公开(公告)日:2011-04-19
Sulfonate salts have the formula: HOCH2CH2CF2CF2SO3−M+ wherein M+ is a Li, Na, K, ammonium or tetramethylammonium ion. Onium salts, oxime sulfonates and sulfonyloxyimides derived from these salts are effective photoacid generators in chemically amplified resist compositions.
磺酸盐的化学式为:HOCH2CH2CF2CF2SO3−M+,其中M+代表锂离子、钠离子、钾离子、铵离子或四甲基铵离子。由这些盐衍生的Onium盐、肟磺酸盐和磺酰氧肟盐在化学增感抗蚀剂组合物中是有效的光酸发生剂。